Abstract: We have studied the effect of substrate material related to thermal mismatch for silicon carbide (SiC) diaphragm-based capacitive pressure sensors. Two sets of devices, with identical ...
Investigation of Chip Temperature on Response Characteristics of the Humidity Sensor From ppm to %RH
Abstract: Many research articles are reported on humidity measurement in the literature. But there is no critical study of temperature on the response characteristics of the humidity sensors, ...
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