Abstract: Pulsed eddy current (PEC) testing is a nondestructive testing (NDT) method, which is highly suitable for thickness measurement and sub-surface-defect detection. In this article, PEC testing ...
Abstract: The eddy current coil is widely adopted to measure the thickness of copper (Cu) film on the silicon (Si) based wafer. However, the lift-off distance (LOD) variation between the coil and Cu ...
†State Key Laboratory of Polymer Physics and Chemistry, Joint Laboratory of Polymer Science and Materials, Beijing National Laboratory for Molecular Sciences, Institute of Chemistry, CAS, Beijing ...
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